Switch/variable optical attenuator (SVOA)

ABSTRACT

A Switch/Variable Optical Attenuator (SVOA) includes a die including at least one 2×2 optical switch and a respective integral variable optical attenuator for each of the at least one 2×2 optical switches. Each of the at least one 2×2 optical switches includes an input optical port, an output optical port, an add optical port, and a drop optical port, the input optical port being connected to the output optical port in one state of the at least one 2×2 optical switch and the add optical port being connected to the output optical port in a second state of the at least one 2×2 optical switch. The output optical port of each of the at least one 2×2 optical switches is optically connected to an input of its respective integral variable optical attenuator.

RELATED APPLICATIONS

[0001] The present application is related to U.S. patent application Ser. No. 09/794,773, filed Feb. 27, 2001 entitled BI-STABLE MICRO-ACTUATOR AND OPTICAL SWITCH and that application is hereby incorporated by reference in its entirety into the present specification and any documents incorporated by reference into application Ser. No. 09/794,773 are also hereby incorporated into the present specification.

BACKGROUND OF THE INVENTION

[0002] 1. Field of the Invention

[0003] The present invention relates to optical switches and variable optical attenuators and more particularly, to a Switch/Variable Optical Attenuator (SVOA) including an integrated Micro-Electro-Mechanical System (MEMS) Optical Switch and MEMS Variable Optical Attenuator (VOA).

[0004] 2. Description of the Related Art

[0005] In the past few years, the demand for telecommunications services has increased the bandwidth requirements placed on the major carriers. Accordingly, these major carriers have had to continue to add equipment to handle the increased load. This increases the total board space needed for such equipment, thereby resulting in a need for a reduced product footprint. That is, it would be advantageous to decrease the size of the needed equipment. One method used to decrease equipment size is to develop products using new technology that are inherently smaller and more compact. For example, the industry standard in small port count optical switches had been opto-mechanical actuators. These opto-mechanical actuators are being replaced by new devices that are smaller in size and more reliable based on MEMS technology.

[0006] Integrating several functions into the same package can also effect a size reduction. Unlike electrical components in which the electrical connections are obtained simply by soldering the components into a circuit board, optical components have fibers that must be connected either by attaching connectors at the ends of the fibers or by fusion spicing the fibers together. Also, room must be left to coil or wrap any extra fiber in such a way that it is not damaged or kinked. This effectively increases the required board space for each component. Eliminating the fiber and connection between two components and integrating the components into a common enclosure can save board space. A good example of this concept is the technology of planar waveguides. By providing waveguide patterns on a substrate material, various functions can be realized on the same chip.

[0007] The advantages of planar waveguide devices do not come without drawbacks. For example, optical switches using planar waveguides tend to be slower and more lossy than MEMS devices. Although the MEMS devices have better performance characteristics, they are generally considered more difficult to integrate. MEMS devices typically depend on free space propagation and mirrors to change the light path. Thus, MEMS devices are limited in the number of functions that can be integrated into a given space. Ideally, it would be desirable to have a device that has the performance characteristics of MEMS devices and the integration factor of planar waveguides.

[0008] In the expanding telecommunication field, there are several combinations of components that are becoming standardized. One such combination is the Reconfigurable Optical Add Drop Multiplexer (ROADM), illustrated in FIG. 1. ROADMs are being used in almost every node of major optical networks and will find more uses in other applications, such as inter-office networks.

[0009] As illustrated in FIG. 1, a multiplexed optical input signal In is inputted to an optical demultiplexer 100 where it is demultiplexed into 16 optical signals, for example. The 16 optical signals are respectively inputted to 16 optical switches 120 whose respective outputs are inputted to an optical multiplexer 140 via respective Variable Optical Attenuators (VOAs) 130. The output of the optical multiplexer 140 is inputted to an optical splitter 150 having one output Out which is the output of the ROADM and having another output which is inputted to an Optical Channel Monitor (OCM) 160 having Voltage Outputs which may be used for monitoring purposes, these Voltage Outputs reflecting the characteristics of the optical signal inputted to the OCM 160 from the optical splitter 150.

[0010] One technique for implementing the ROADM illustrated in FIG. 1 is to use arrayed waveguides for the multiplexer 140 and demultiplexer 100 and to use commercially available MEMS devices for the switches 120 and the VOAs 130.

[0011] The add/drop function of the ROADM is usually performed with a 2×2 switch 220 as illustrated in FIG. 2. Such a 2×2 switch 220 has an Inserted State and a Bypass State. In the Bypass State, the input In is connected to the output Out. In the Inserted State, the Add input is connected to the Out output while the input In is connected to the Drop output. Thus, an incoming signal can either be allowed to pass through or dropped out and a new signal inserted in its place. In either case, fluctuations in the signal power occur and the added signal almost never has the same signal power level as the incoming signal. Accordingly, it is necessary to equalize and level the signal power level. This may be effected by connecting a VOA 130 between the output of the switch 220 and the multiplexer 140 (not shown in FIG. 2). Unfortunately, a connector or fusion splice 210 must be provided between the switch 220 and the VOA 130.

[0012] If the switch 220 and the VOA 130 of FIG. 2 could be combined, the combination thereof would be simplified by eliminating one package and one connector or splice and the resulting combination would have a reduced footprint and reduced assembly time as well as having an improved reliability. On the manufacturing side, the integration of these two devices would eliminate four fiber end-face preparations and would eliminate one entire device packaging process.

SUMMARY OF THE INVENTION

[0013] In view of the above, it is an object of the present invention to provide a Switch/Variable Optical Attenuator (SVOA) including an integrated (MEMS) Optical Switch and Variable Optical Attenuator (VOA).

[0014] These and other objects may be effected by providing a Switch/Variable Optical Attenuator (SVOA) including: a die including at least one 2×2 optical switch and a respective integral variable optical attenuator for each of the at least one 2×2 optical switches; wherein each of the at least one 2×2 optical switches includes an input optical port, an output optical port, an add optical port, and a drop optical port, the input optical port being connected to the output optical port in one state of the at least one 2×2 optical switches and the add optical port being connected to the output optical port in a second state of the at least one 2×2 optical switches; and wherein the output optical port of each of the at least one 2×2 optical switches is optically connected to an input of its respective integral variable optical attenuator.

[0015] In the SVOA described above, the at least one 2×2 optical switch and respective integral variable optical attenuator may include N 2×2 optical switches and respective integral variable optical attenuators, N being an integer greater than 1 and each of the at least one 2×2 optical switch may include an Optical Micro-Electro-Mechanical System (MEMS) Switch.

[0016] Furthermore, in the SVOA described above, each respective variable optical attenuator may include a MEMS variable optical attenuator.

[0017] The foregoing and a better understanding of the present invention will become apparent from the following detailed description of an example embodiment and the claims when read in connection with the accompanying drawings, all forming a part of the disclosure of this invention. While the foregoing and following written and illustrated disclosure focuses on disclosing an example embodiment of the invention, it should be clearly understood that the same is by way of illustration and example only and that the invention is not limited thereto. This spirit and scope of the present invention are limited only by the terms of the appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

[0018]FIG. 1 is a block diagram illustrating ROADM topology.

[0019]FIG. 2 is a block diagram illustrating a 2×2 switch and VOA implementation.

[0020]FIG. 3 schematically illustrates an SVOA.

[0021]FIG. 4 illustrates an SVOA in accordance with an example embodiment of the present invention.

[0022]FIG. 5 illustrates a pass through switch operation with optical attenuation of an SVOA in accordance with an example embodiment of the present invention.

[0023]FIG. 6 illustrates a blocking function of a switch with optical attenuation of an SVOA in accordance with an example embodiment of the present invention.

[0024]FIG. 7 illustrates component spacing of an SVOA in accordance with an example embodiment of the present invention.

[0025]FIG. 8 illustrates a component spacing detail of the SVOA of FIG. 7.

[0026]FIG. 7 illustrates component spacing of an SVOA in accordance with an example embodiment of the present invention.

[0027]FIG. 8 illustrates a component spacing detail of the SVOA of FIG. 7.

[0028]FIG. 9 is a three-dimensional block view of an SVOA in accordance with an example embodiment of the present invention.

DETAILED DESCRIPTION

[0029] Before beginning a detailed description of the subject invention, mention of the following is in order. When appropriate, like reference numerals and characters may be used to designate identical, corresponding, or similar components in differing drawing figures. Furthermore, in the detailed description to follow, example sizes/models/value/ranges may be given, although the present invention is not limited thereto. Still furthermore, any clock or timing signals in the drawing figures are not drawn to scale but rather, exemplary and critical time values are mentioned when appropriate. When specific details are set forth in order to describe example embodiment of the invention, it should be apparent to one skilled in the art that the invention can be practiced without, or with variations of, these specific details. Lastly, it should be apparent that differing combinations of hard-wired control circuitry and software instructions may be used to implement embodiments of the present invention, that is, the present invention is not limited to any specific combination of hardware and software.

[0030]FIG. 3 schematically illustrates an SVOA 310. In such an SVOA, a VOA 311, which is integrated with a 2×2 switch, is located upstream of the switch output OUT. It is to be noted that both the switch and the VOA 311 can be actuated by either electrostatic or thermal MEMS actuators, for example. These actuators have been omitted from some of the drawing figures for the sake of clarity. Furthermore, it is noted that the switch may be a bistable switch, that is, the switch may be latched in either a blocking or non-blocking mode.

[0031] As illustrated in FIG. 4, one possible arrangement for an SVOA 310 is to combine a MEMS switch with an attenuation vane 450 on the output side thereof. One switch design, having a switch actuator 420 and a VOA actuator 430, uses a lensed fiber, for example, to collimate and transmit light across an air gap to another lensed fiber. A mirror blade 440 located between the fibers can be used to redirect the light to a third fiber. If sufficient room is provided between the face of the output fiber and the mirror blade 440, it is possible to locate an attenuator vane 450 therebetween to block part of the light and thereby effect attenuation. The VOA actuator 430 moves the attenuator vane 450 so as to control the amount of attenuation. The IN terminal is at the end of fiber 442, the DROP terminal is at the end of fiber 441, the OUT terminal is at the end of fiber 443, and the ADD terminal is at the end of fiber 444. The switch actuator 420 moves the mirror blade 440 so as to optically connect either the IN terminal with the OUT terminal or the ADD terminal with the OUT terminal.

[0032]FIG. 5 illustrates a pass through switch operation with optical attenuation of an SVOA in accordance with an example embodiment of the present invention. As clearly illustrated in FIG. 5, the mirror blade 440 is out of the way, thereby allowing light to pass across the air gap from fiber 442 to fiber 443. The attenuator vane 450 partially blocks the passage of light across the air gap and may be incrementally moved, thus providing different levels of attenuation in accordance with the amount of light being blocked.

[0033]FIG. 6 illustrates a blocking function of a switch with optical attenuation of an SVOA in accordance with an example embodiment of the present invention. As clearly illustrated in FIG. 6, light is inputted into the air gap by fiber 444 and is reflected by the mirror blade 440 into fiber 443. The attenuator vane 450 still partially blocks the passage of light across the air gap so as to still provide different levels of attenuation in accordance with the amount of light being blocked.

[0034]FIG. 7 illustrates exemplary component spacing of an SVOA in accordance with an example embodiment of the present invention and FIG. 8 illustrates a component spacing detail of the SVOA of FIG. 7. For example, as illustrated in FIG. 7, the distance across the air gap 700 may be on the order of 200 microns while the distance 710 between distant corners of the fibers 442 and 443 may be on the order of 230 microns and the distance 720 between adjacent corners of the fibers 442 and 443 may be on the order of 53 microns.

[0035] Similarly, as illustrated in FIG. 8, the width 800 of the mirror blade 440 may be on the letter of 1.5 microns. The width 830 of the attenuator vane 850, which includes a bent portion to improve back-reflection, may be on the order of 5 microns. The distance 810 between the mirror blade 440 and the attenuator vane 850 may be on the order of 10 microns and the distance 840 between the attenuator vane 850 and the face of the fiber 443 may also be on the order of 10 microns. Furthermore, the distance 820 between the centerline of the mirror blade 440 and the corner of the fiber 443 may be on the order of 26.5 microns.

[0036]FIG. 9 is a three-dimensional view of an SVOA in accordance with an example embodiment of the present invention. By including both a switch and a variable optical attenuator on the same chip die, for example, a silicon substrate, the overall size can be reduced significantly as compared with a switch and a variable optical attenuator on separate chip dies. Because of this, any chip layout currently designed for the switch alone, could be readily expanded to accommodate the added variable optical attenuator. This is particularly important in the case of multi-device modules, where, for example, 16 SVOAs might have substantially the same footprint as 16 switches by themselves. Furthermore, if the operating voltages for the SVOAs are low enough, a microprocessor and D/A (Digital/Analog) converter might be included in the same package so as to provide a completely digital interface.

[0037] This concludes the description of the example embodiment. Although the present invention has been described with reference to a number of illustrative embodiments thereof, it should be understood that numerous other modifications and embodiments can be devised by those skilled in the art that will fall within the spirit and scope of the principles of this invention. More particularly, reasonable variations 

What is claimed is:
 1. A Switch/Variable Optical Attenuator (SVOA) comprising: a die including at least one 2×2 optical switch and a respective integral variable optical attenuator for each of said at least one 2×2 optical switches; wherein each of said at least one 2×2 optical switches comprises an input optical port, an output optical port, an add optical port, and a drop optical port, said input optical port being connected to said output optical port in one state of said at least one 2×2 optical switch and said add optical port being connected to said output optical port in a second state of said at least one 2×2 optical switch; and wherein said output optical port of each of said at least one 2×2 optical switches is optically connected to an input of its respective integral variable optical attenuator.
 2. The SVOA of claim 1, wherein said at least one 2×2 optical switch and respective integral variable optical attenuator comprises N 2×2 optical switches and respective integral variable optical attenuators, N being an integer greater than
 1. 3. The SVOA of claim 1, wherein each of said at least one 2×2 optical switches comprises an Optical Micro-Electro-Mechanical System (MEMS) Switch.
 4. The SVOA of claim 2, wherein each of said at least one 2×2 optical switches comprises an Optical Micro-Electro-Mechanical System (MEMS) Switch.
 5. The SVOA of claim 1, wherein each respective variable optical attenuator comprises a MEMS variable optical attenuator.
 6. The SVOA of claim 2, wherein each respective variable optical attenuator comprises a MEMS variable optical attenuator.
 7. The SVOA of claim 3, wherein each respective variable optical attenuator comprises a MEMS variable optical attenuator.
 8. The SVOA of claim 4, wherein each respective variable optical attenuator comprises a MEMS variable optical attenuator.
 9. A method of manufacturing a Switch/Variable Optical Attenuator (SVOA), the method comprising: fabricating at least one 2×2 optical switch on a die; fabricating a respective integral variable optical attenuator for each of said at least one 2×2 optical switches on the die; wherein each of said at least one 2×2 optical switches comprises an input optical port, an output optical port, an add optical port, and a drop optical port, said input optical port being connected to said output optical port in one state of said at least one 2×2 optical switch and said add optical port being connected to said output optical port in a second state of said at least one 2×2 optical switch; and fabricating an optical connection between said output optical port of each of said at least one 2×2 optical switches and an input of its respective integral variable optical attenuator.
 10. The method of claim 9, wherein fabricating said at least one 2×2 optical switch and respective integral variable optical attenuator comprises fabricating N 2×2 optical switches and respective integral variable optical attenuators, N being an integer greater than
 1. 11. The method of claim 9, wherein fabricating each of said at least one 2×2 optical switches comprises fabricating an Optical Micro-Electro-Mechanical Switch (MEMS) Switch.
 12. The method of claim 10, wherein fabricating each of said at least one 2×2 optical switches comprises fabricating an Optical Micro-Electro-Mechanical System (MEMS) Switch.
 13. The method of claim 9, wherein fabricating each respective variable optical attenuator comprises fabricating a MEMS variable optical attenuator.
 14. The method of claim 10, wherein fabricating each respective variable optical attenuator comprises fabricating a MEMS variable optical attenuator.
 15. The method of claim 11, wherein fabricating each respective variable optical attenuator comprises fabricating a MEMS variable optical attenuator.
 16. The method of claim 12, wherein fabricating each respective variable optical attenuator comprises fabricating a MEMS variable optical attenuator.
 17. A Reconfigurable Optical Add Drop Multiplexer (ROADM) comprising: an optical demultiplexer to receive a first multiplexed optical signal and to output a plurality of demultiplexed optical signals; a plurality of Switch/Variable Optical Attenuators (SVOAs) to respectively receive said plurality of demultiplexed optical signals and to selectively output a plurality of switched/attenuated optical signals; and an optical multiplexer to receive said plurality of switched/attenuated optical signals from said plurality of SVOAs and to output a second multiplexed optical signal; wherein each of said SVOAs comprises: a die including at least one 2×2 optical switch and a respective integral variable optical attenuator for each of said at least one 2×2 optical switches; wherein each of said at least one 2×2 optical switches comprises an input optical port, an output optical port, an add optical port, and a drop optical port, said input optical port being connected to said output optical port in one state of said at least one 2×2 optical switch and said add optical port being connected to said output optical port in a second state of said at least one 2×2 optical switch; and wherein said output optical port of each of said at least one 2×2 optical switches is optically connected to an input of its respective integral variable optical attenuator.
 18. The ROADM of claim 17, wherein said at least one 2×2 optical switch and respective integral variable optical attenuator comprises N 2×2 optical switches and respective integral variable optical attenuators, N being an integer greater than
 1. 19. The ROADM of claim 17, wherein each of said at least one 2×2 optical switches comprises an Optical Micro-Electro-Mechanical System (MEMS) Switch.
 20. The ROADM of claim 18, wherein each of said at least one 2×2 optical switches comprises an Optical Micro-Electro-Mechanical System (MEMS) Switch.
 21. The ROADM of claim 17, wherein each respective variable optical attenuator comprises a MEMS variable optical attenuator.
 22. The ROADM of claim 18, wherein each respective variable optical attenuator comprises a MEMS variable optical attenuator.
 23. The ROADM of claim 19, wherein each respective variable optical attenuator comprises a MEMS variable optical attenuator.
 24. The ROADM of claim 20, wherein each respective variable optical attenuator comprises a MEMS variable optical attenuator.
 25. A method of manufacturing a Reconfigurable Optical Add Drop Multiplexer (ROADM), the method comprising: fabricating an optical demultiplexer to receive a first multiplexed optical signal and to output a plurality of demultiplexed optical signals; fabricating a plurality of Switch/Variable Optical Attenuators (SVOAs) to respectively receive said plurality of demultiplexed optical signals and to selectively output a plurality of switched/attenuated optical signals; and fabricating an optical multiplexer to receive said plurality of switched/attenuated optical signals from said plurality of SVOAs and to output a second multiplexed optical signal; wherein each of said SVOAs is manufactured by a method that comprises: fabricating at least one 2×2 optical switch and a respective integral variable optical attenuator for each of said at least one 2×2 optical switches on a die; wherein each of said at least one 2×2 optical switches comprises an input optical port, an output optical port, an add optical port, and a drop optical port, said input optical port being connected to said output optical port in one state of said at least one 2×2 optical switch and said add optical port being connected to said output optical port in a second state of said at least one 2×2 optical switch; and fabricating an optical connection between said output optical port of each of said at least one 2×2 optical switches and an input of its respective integral variable optical attenuator.
 26. The method of claim 25, wherein fabricating said at least one 2×2 optical switch and respective integral variable optical attenuator comprises fabricating N 2×2 optical switches and respective integral variable optical attenuators, N being an integer greater than
 1. 27. The method of claim 25, wherein fabricating each of said at least one 2×2 optical switches comprises fabricating an Optical Micro-Electro-Mechanical System (MEMS)_Switch. and modifications are possible in the component parts and/or arrangements of the subject combination arrangements within the scope of the foregoing disclosure, the drawings, and the appended claims without departing from the spirit of the invention. In additions to variations and modifications in the component parts and/or arrangements, alternative uses will also be apparent to those skilled in the art.
 28. The method of claim 26, wherein fabricating each of said at least one 2×2 optical switches comprises fabricating an Optical Micro-Electro-Mechanical System (MEMS) Switch.
 29. The method of claim 25, wherein fabricating each respective variable optical attenuator comprises fabricating a MEMS variable optical attenuator.
 30. The method of claim 26, wherein fabricating each respective variable optical attenuator comprises fabricating a MEMS variable optical attenuator.
 31. The method of claim 27, wherein fabricating each respective variable optical attenuator comprises fabricating a MEMS variable optical attenuator.
 32. The method of claim 28, wherein fabricating each respective variable optical attenuator comprises fabricating a MEMS variable optical attenuator.
 33. A method of operating a Reconfigurable Optical Add Drop Multiplexer (ROADM), the method comprising: inputting a first multiplexed optical signal to an optical demultiplexer, the optical demultiplexer outputting a plurality of demultiplexed optical signals; respectively inputting the plurality of demultiplexed optical signals to a plurality of Switch/Variable Optical Attenuators (SVOAs), the plurality of SVOAs respectively selectively outputting a plurality of switch/attenuated optical signals; and inputting the plurality of switch/attenuated optical signals to an optical multiplexer, the optical multiplexer outputting a second multiplex optical signal; wherein each of the plurality of SVOAs includes at least one 2×2 optical switch and respective integral variable optical attenuator on a die, the at least one 2×2 optical switch receiving one of the plurality of demultiplexed optical signals and the respective integral variable optical attenuator outputting one of the plurality of switch/attenuated optical signals.
 34. The method of claim 33, wherein said at least one 2×2 optical switch and respective integral variable optical attenuator comprises N 2×2 optical switches and respective integral variable optical attenuators, N being an integer greater than
 1. 35. The method of claim 33, wherein each of said at least one 2×2 optical switches comprises an Optical Micro-Electro-Mechanical System (MEMS) Switch.
 36. The method of claim 34, wherein each of said at least one 2×2 optical switches comprises an Optical Micro-Electro-Mechanical System (MEMS) Switch.
 37. The method of claim 33, wherein each respective variable optical attenuator comprises a MEMS variable optical attenuator.
 38. The method of claim 34, wherein each respective variable optical attenuator comprises a MEMS variable optical attenuator.
 39. The method of claim 35, wherein each respective variable optical attenuator comprises a MEMS variable optical attenuator.
 40. The method of claim 36, wherein each respective variable optical attenuator comprises a MEMS variable optical attenuator.
 41. The SVOA of claim 1, further comprising an actuator to actuate said at least one 2×2 optical switch.
 42. The SVOA of claim 1, further comprising an actuator to actuate said respective variable optical attenuator.
 43. The SVOA of claim 41, wherein said actuator comprises one of an electrostatic or thermal MEMS actuator.
 44. The SVOA of claim 42, wherein said actuator comprises one of an electrostatic or thermal MEMS actuator.
 45. The method of claim 9, further comprising fabricating an actuator to actuate said at least one 2×2 optical switch.
 46. The method of claim 9, further comprising fabricating an actuator to actuate said respective variable optical attenuator.
 47. The method of claim 44, wherein fabricating said actuator comprises fabricating one of an electrostatic or thermal MEMS actuator.
 48. The method of claim 45, wherein fabricating said actuator comprises fabricating one of an electrostatic or thermal MEMS actuator.
 49. The ROADM of claim 17, further comprising an actuator to actuate said at least one 2×2 optical switch.
 50. The ROADM of claim 17, further comprising an actuator to actuate said respective variable optical attenuator.
 51. The ROADM of claim 48, wherein said actuator comprises one of an electrostatic or thermal MEMS actuator.
 52. The ROADM of claim 49, wherein said actuator comprises one of an electrostatic or thermal MEMS actuator.
 53. The method of claim 25, further comprising fabricating an actuator to actuate said at least one 2×2 optical switch.
 54. The method of claim 25, further comprising fabricating an actuator to actuate said respective variable optical attenuator.
 55. The method of claim 52, wherein fabricating said actuator comprises fabricating one of an electrostatic or thermal MEMS actuator.
 56. The method of claim 53, wherein fabricating said actuator comprises fabricating one of an electrostatic or thermal MEMS actuator.
 57. The method of claim 33, further comprising an actuator to actuate said at least one 2×2 optical switch.
 58. The method of claim 33, further comprising an actuator to actuate said respective variable optical attenuator.
 59. The method of claim 56, wherein said actuator comprises one of an electrostatic or thermal MEMS actuator.
 60. The method of claim 57, wherein said actuator comprises one of an electrostatic or thermal MEMS actuator.
 61. The SVOA of claim 1, wherein at least one optical switch comprises at least one bistable optical switch.
 62. The method of claim 9, wherein fabricating at least one optical switch comprises fabricating at least one bistable optical switch.
 63. The ROADM of claim 17, wherein at least one optical switch comprises at least one bistable optical switch.
 64. The method of claim 25, wherein fabricating at least one optical switch comprises fabricating at least one bistable optical switch.
 65. The method of claim 33, wherein at least one optical switch comprises at least one bistable optical switch. 